基于二维声子晶体的体声波谐振器仿真分析

doi:10.11959/j.issn.2096-3750.2022.00251

物联网学报 ›› 2022, Vol. 6 ›› Issue (1): 13-19.doi: 10.11959/j.issn.2096-3750.2022.00251

• 专题：物联终端与芯片 • 上一篇下一篇

基于二维声子晶体的体声波谐振器仿真分析

石林豪¹, 轩伟鹏¹, 孙玲玲¹, 董树荣², 金浩², 骆季奎¹

¹ 杭州电子科技大学电子信息学院射频电路与系统教育部重点实验室，浙江杭州 310018
² 浙江大学信息与电子工程学院，浙江杭州 310027

修回日期:2022-02-25 出版日期:2022-03-30 发布日期:2022-03-01
作者简介:石林豪（1997− ），男，杭州电子科技大学电子信息学院硕士生，主要研究方向为薄膜体声波谐振器
轩伟鹏（1990− ），男，博士，杭州电子科技大学副教授，主要研究方向为压电MEMS器件、薄膜体声波器件及其在传感器、滤波器等领域的基础理论与应用
孙玲玲（1956− ），女，杭州电子科技大学教授、射频电路与系统教育部重点实验室主任，主要研究方向为微波毫米波集成电路与智能系统设计
董树荣（1973− ），男，浙江大学教授，主要研究方向为MEMS、智能传感、柔性电子
金浩（1979− ），男，浙江大学副教授，主要研究方向为MEMS、医疗电子
骆季奎（1960− ），男，浙江大学教授，主要研究方向为智能传感器，纳米发电机，基于表面声波的微流体器件、微泵、微混合器、传感器等
基金资助:
浙江省重点研发计划(2021C05004)

Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals

Linhao SHI¹, Weipeng XUAN¹, Lingling SUN¹, Shurong DONG², Hao JIN², Jikui LUO¹

¹ Ministry of Education Key Lab of RF Circuits and Systems, School of Electronics and Information Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
² College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China

Revised:2022-02-25 Online:2022-03-30 Published:2022-03-01
Supported by:
The Key Research and Development Program of Zhejiang Province(2021C05004)

摘要/Abstract

摘要：

提出了一种基于声子晶体的新型体声波谐振器结构，利用声子晶体在其带隙范围内对弹性波具有高反射率、低透射率的特点，将声子晶体作为体声波谐振器底部的声反射层。首先计算出了4种不同结构声子晶体的带隙特性，并使用有限元软件COMSOL Multiphysics对基于声子晶体的体声波谐振器结构进行建模仿真，得出了主要结论。当体声波谐振器工作频率在声子晶体带隙范围内时，直接以声子晶体作为体声波谐振器的衬底，仿真得到的阻抗曲线较为平滑，且Q值为858.09，有效机电耦合系数为6.32%。

关键词: 体声波谐振器, 高反射率, 声子晶体, 有限元分析

Abstract:

A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high reflectivity and low transmittance of elastic wave in its band gap.The band gap characteristics of four kinds of phononic crystals with different structures were calculated by the finite element software COMSOL Multiphysics.The main conclusions are as follows.If the bulk acoustic resonator is working within the band gap of the phononic crystal, PnC can be used as the bottom acoustic reflection layer of the FBAR.With using PnC as the acoustic energy reflect structure, the impedance curve of FBAR is smooth, and the quality factor is closed to traditional FBAR with a value of 859 and effective mechanical coupling coefficient of 6.32%.

Key words: film bulk acoustic resonator, high reflectivity, phononic crystal, finite element analysis

中图分类号:

TN629.1

石林豪, 轩伟鹏, 孙玲玲, 董树荣, 金浩, 骆季奎. 基于二维声子晶体的体声波谐振器仿真分析[J]. 物联网学报, 2022, 6(1): 13-19.

Linhao SHI, Weipeng XUAN, Lingling SUN, Shurong DONG, Hao JIN, Jikui LUO. Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals[J]. Chinese Journal on Internet of Things, 2022, 6(1): 13-19.

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参考文献 15

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材料	密度p/(kg·m^-3)	声速/(m·s^-1)	样式模量E/GPa
硅	2 330	8 320	160
空气	1.293	343	—

结构	fr/MHz	fa/MHz	Δf/MHz	Keff	Qr	Qp
PnC-FBAR	2 421.3	2 501.6	80.3	6.32%	858.09	595.60
Air-FBAR	2 465.6	2 548.4	82.8	6.69%	1 065.62	1 037.92
SMR-FBAR	2 454.1	2 525.4	71.3	5.54%	918.09	802.08

基于二维声子晶体的体声波谐振器仿真分析

Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals

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