基于二维声子晶体的体声波谐振器仿真分析
石林豪, 轩伟鹏, 孙玲玲, 董树荣, 金浩, 骆季奎
Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals
Linhao SHI, Weipeng XUAN, Lingling SUN, Shurong DONG, Hao JIN, Jikui LUO
物联网学报
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2022, (1): 13
-19
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DOI: 10.11959/j.issn.2096-3750.2022.00251
