基于二维声子晶体的体声波谐振器仿真分析

doi:10.11959/j.issn.2096-3750.2022.00251

Chinese Journal on Internet of Things ›› 2022, Vol. 6 ›› Issue (1): 13-19.doi: 10.11959/j.issn.2096-3750.2022.00251

• Topic: IoT Terminals and Chips • Previous Articles Next Articles

Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals

Linhao SHI¹, Weipeng XUAN¹, Lingling SUN¹, Shurong DONG², Hao JIN², Jikui LUO¹

¹ Ministry of Education Key Lab of RF Circuits and Systems, School of Electronics and Information Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
² College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China

Revised:2022-02-25 Online:2022-03-30 Published:2022-03-01
Supported by:
The Key Research and Development Program of Zhejiang Province(2021C05004)

Abstract

Abstract:

A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high reflectivity and low transmittance of elastic wave in its band gap.The band gap characteristics of four kinds of phononic crystals with different structures were calculated by the finite element software COMSOL Multiphysics.The main conclusions are as follows.If the bulk acoustic resonator is working within the band gap of the phononic crystal, PnC can be used as the bottom acoustic reflection layer of the FBAR.With using PnC as the acoustic energy reflect structure, the impedance curve of FBAR is smooth, and the quality factor is closed to traditional FBAR with a value of 859 and effective mechanical coupling coefficient of 6.32%.

Key words: film bulk acoustic resonator, high reflectivity, phononic crystal, finite element analysis

CLC Number:

TN629.1

Linhao SHI, Weipeng XUAN, Lingling SUN, Shurong DONG, Hao JIN, Jikui LUO. Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals[J]. Chinese Journal on Internet of Things, 2022, 6(1): 13-19.

Figures/Tables 11

References 15

[1]	谢和平, 张树人, 杨成韬 ,等. 薄膜体声波谐振器的研究进展[J]. 材料导报, 2006,20(S2): 330-332.
	XIE H P , ZHANG S R , YANG C T ,et al. Research progress in film bulk acoustic resonator[J]. Materials Review, 2006,20(S2): 330-332.
[2]	韩东, 胡顺欣, 冯彬 ,等. Si 基薄膜体声波谐振器(FBAR)技术研究[J]. 半导体技术, 2012,37(6): 456-459,469.
	HAN D , HU S X , FENG B ,et al. Study on silicon-based film bulk acoustic resonator (FBAR) technology[J]. Semiconductor Technology, 2012,37(6): 456-459,469.
[3]	焦向全 . 体声波谐振器空腔结构研究[D]. 成都:电子科技大学, 2015.
	JIAO X Q . Research on cavity structure of film bulk acoustic resonator[D]. Chengdu:University of Electronic Science and Technology of China, 2015.
[4]	杨泰, 张根, 秦康宁 ,等. 一种基于柔性基底的薄膜体声波谐振器[J]. 压电与声光, 2018,40(6): 901-904.
	YANG T , ZHANG G , QIN K N ,et al. A thin film bulk acoustic resonator based on flexible substrate[J]. Piezoelectrics ＆ Acoustooptics, 2018,40(6): 901-904.
[5]	GARCIA-RAFFI L M , SALMERóN-CONTRERAS L J , HERRERO-DURá I ,et al. Broadband reduction of the specular reflections by using sonic crystals:a proof of concept for noise mitigation in aerospace applications[J]. Aerospace Science and Technology, 2018,73: 300-308.
[6]	WU T T , WU L C , HUANG Z G . Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers[J]. Journal of Applied Physics, 2005,97(9): 094916.
[7]	SIDDIQI M , LEE J . AlN-on-Si MEMS resonator bounded by wide acoustic bandgap two-dimensional phononic crystal anchors[M]. 2018.
[8]	TONG Y J , HAN T . Anchor loss reduction of lamb wave resonator by pillar-based phononic crystal[J]. Micromachines, 2021,12(1): 62.
[9]	TU C , LEE J E Y , ZHANG X S . Dissipation analysis methods and Q-enhancement strategies in piezoelectric MEMS laterally vibrating resonators:areview[J]. Sensors, 2020,20(17): 4978.
[10]	LI Y , LIANG B , ZOU X Y ,et al. Extraordinary acoustic transmission through ultrathin acoustic metamaterials by coiling up space[J]. Applied Physics Letters, 2013,103(6): 063509.
[11]	WANG T , WANG H , SHENG M P ,et al. Complete low-frequency bandgap in a two-dimensional phononic crystal with spindle-shaped inclusions[J]. Chinese Physics B, 2016,25(4): 046301.
[12]	鄂羽佳 . SMR 全绝缘布拉格反射栅的设计、制备与表征[D]. 哈尔滨:哈尔滨工业大学, 2019.
	E Y J . Design,fabrication and characterization of SMR fully insulated Bragg reflector[D]. Harbin:Harbin Institute of Technology, 2019.
[13]	ZHU X , XIAO Y , WEN J , YU D ,et al. Flexural wave band gaps and vibration reduction properties of a locally resonant stiffened plate (In Chinese)[EB]. 2016.
[14]	NGUYEN N , JOHANNESSEN A , ROOTH S ,et al. A design approach for high-Q FBARs with a dual-step frame[J]. IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control, 2018,65(9): 717-1725.
[15]	刘松, 罗春荣, 翟世龙 ,等. 负质量密度声学超材料的反常多普勒效应[J]. 物理学报, 2017,66(2): 024301.
	LIU S , LUOC R , ZHAI S L ,et al. Inverse Doppler effect of acoustic metamaterial with negative mass density[J]. Acta Physica Sinica, 2017,66(2): 024301.

Metrics

Recommended 0

No Suggested Reading articles found!

材料	密度p/(kg·m^-3)	声速/(m·s^-1)	样式模量E/GPa
硅	2 330	8 320	160
空气	1.293	343	—

结构	fr/MHz	fa/MHz	Δf/MHz	Keff	Qr	Qp
PnC-FBAR	2 421.3	2 501.6	80.3	6.32%	858.09	595.60
Air-FBAR	2 465.6	2 548.4	82.8	6.69%	1 065.62	1 037.92
SMR-FBAR	2 454.1	2 525.4	71.3	5.54%	918.09	802.08

Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals

RichHTML

PDF下载

Knowledge

Abstract

Cite this article

share this article

Figures/Tables 11

References 15

Related Articles 0

Metrics

Recommended 0